parts overhaul
Parts Development
| Div. | Name | Description | Apply tools |
|---|---|---|---|
| Mechanism | Manifold & Vacuum Part | Has a drawing | Furnace, CVD |
| Frame and sheet-metal | Has a drawing Able to sketch | All fab’s tools | |
| Quartz Ware | Has a drawing Able to develop | Furnace, RTP | |
| Electrical PCB | OEM Part | Has a drawing Able to sketch | |
| Cable Harness | Has a drawing Able to sketch | Furnace, CVD, RTP | |
| Special Part & PCB | Furnace, CVD, RTP, Track | TEL,KE,AG, etc.. |
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Mechanical parts
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Electrical / PCB
Parts Repairing, Used & Brand new parts sourcing
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TORAY Japan O2 Analyzer
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NGK Japan O2 Analyzer
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Advanced Energy, Exhaust Controller & Valve
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SENTRY(PTI), Exhaust Controller & Valve
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Air-products (Schumacher) ATCS-15 Bubbler
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Air-products (Schumacher) VG300 Series Bubbler
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VAT, Load Lock Slot Valve
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MKS, Roughing Valve
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MKS, Gate Valve
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VAT, Roughing Valve
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VAT, Bellows Gate Valve
New Developed Item - Mechanical Parts
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For ALD Process, Dust Trap
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Coolant Trap
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Multi Structure Mesh Trap
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Disk Trap
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Customize Welded Bellows
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Customize Welded Bellows
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Welded Bellows used application
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Customize Load Lock Valve Blade
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Leak rate: ＜ 1 * 10-8 atm cc/sec
Application
.All Vacuum Process, Any types of Valves
.200mm & 300mm
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Teflon(PTFE) Parts
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Radiator for RCU Heater
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Vacuum pipe clamps, Quartz clamps